Electroceramic-Based MEMS: Fabrication-Technology and Applications
Electroceramic-Based MEMS: Fabrication-Technology and Applications by Nava Setter
English | 3 Mar. 2005 | ISBN: 0387233105 | 415 Pages | PDF | 8 MB
English | 3 Mar. 2005 | ISBN: 0387233105 | 415 Pages | PDF | 8 MB
The concept of micromachining of silicon to form micron-scale structures such as cantilevers, free-standing bridges, membranes, and channels and its combination with microelectronics fabrication methodology and technology has resulted in the em- gence of a new category of functional systems called MEMS (microelectomechanical systems).