Tags
Language
Tags
March 2024
Su Mo Tu We Th Fr Sa
25 26 27 28 29 1 2
3 4 5 6 7 8 9
10 11 12 13 14 15 16
17 18 19 20 21 22 23
24 25 26 27 28 29 30
31 1 2 3 4 5 6

Micro and Nano Fabrication: Tools and Processes

Posted By: insetes
Micro and Nano Fabrication: Tools and Processes

Micro and Nano Fabrication: Tools and Processes By Hans H. Gatzen, Volker Saile, Jürg Leuthold
2015 | 548 Pages | ISBN: 3662443945 | PDF | 22 MB


For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.