Micro and Nano Fabrication: Tools and Processes By Hans H. Gatzen, Volker Saile, Jürg Leuthold
2015 | 548 Pages | ISBN: 3662443945 | PDF | 22 MB
2015 | 548 Pages | ISBN: 3662443945 | PDF | 22 MB
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.