The MEMS Handbook
Mohamed Gad-el-Hak " The MEMS Handbook "
CRC; 1 edition | ISBN: 0849300770 | 2001 | 1368 Pages | 61.34 MB
CRC; 1 edition | ISBN: 0849300770 | 2001 | 1368 Pages | 61.34 MB
Microelectromechanical systems (MEMS)-tiny machines between one millimeter and one micron long-are finding increasing application in a variety of industrial and medical fields and have a potential worldwide market in the billions of dollars. This handbook explores various aspects of MEMS: their design, fabrication, and applications as well as the physical modeling of their operations. It will be indispensible as a reference for both experienced and graduate student scientists and engineers.