"Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies" ed. by Kenichi Takahata

Reviewing state-of-the-art technologies and their future trends, this book focuses on the latest development of devices and fabrication processes in the field of these extremely miniaturized electromechanical systems. The book offers new knowledge and insight into design, fabrication, and packaging, as well as solutions in these aspects for targeted applications, aiming to support scientists, engineers and academic trainees who are engaged in relevant research.

In the chapters, practical issues and advances are discussed for flexible microdevices, bioMEMS, intelligent implants, optical MEMS, nanomachined structures and NEMS, and others.
Most of the chapters also focus on novel fabrication/packaging processes, including silicon bulk micromachining, laser micromachining, nanolithography, and packaging for implantable microelectronics enabled by nanomaterials.

Contents
Preface
Chapter 1 Flexible Circuit Technologies for Biomedical Applications
Chapter 2 Liquid Encapsulation Technology for Microelectromechanical Systems
Chapter 3 Electroporation Based Drug Delivery and Its Applications
Chapter 4 Optical MEMS for Telecommunications: Some Reliability Issues
Chapter 5 CMOS Compatible Bulk Micromachining
Chapter 6 Laser Micromachining for Gallium Nitride Based Light-Emitting Diodes
Chapter 7 Mechanics of Nanoelectromechanical Systems: Bridging the Gap Between Experiment and Theory
Chapter 8 Nanolithography
Chapter 9 Nanotechnology for Packaging